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Rapid Thermal Processing of Semiconductors (Microdevices), by Victor Borisenko, Peter J. Hesketh
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Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
- Sales Rank: #6161541 in Books
- Brand: Brand: Springer
- Published on: 1997-05-31
- Original language: English
- Number of items: 1
- Dimensions: 10.00" h x .88" w x 7.01" l, 1.92 pounds
- Binding: Hardcover
- 358 pages
- Used Book in Good Condition
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